Canon Stepper FPA3000 i5++. Canon FPA-5000 ES5 Scanner 12" (sourced) Canon 2500 i3 Stepper (sourced) Canon 2500i2 Mask Aligner (sourced) Canon 3000i4 (sourced) Canon 300FPA Scanner (sourced) Canon 4X wafer stepper (sourced) Canon 5500 iZa (sourced) Canon Anelva C7100EX Sputter (sourced) Canon Anelva Cosmos ii i-1201CX Cu PVD Seed/Barrier (sourced)CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. 35µm resolution and 100wph on 200mm wafers. Field size is 22mm x 22mm. Recently Sold Equipment. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Field Size: 22 X 22 mm. FPA 3000 I4, I5 Canon Y60-0866-000 FLY’S EYE LEN UNIT. a positive photoresist (PR) layer, exposed to I-line stepper (Canon FPA-3000 i5+) through a mask, and then developed in regular sequence. 02. 1/1. CANON FPA-3000 I5 is one of the most advanced wafer steppers on the market, and provides impressive levels of accuracy and inspection results. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. The FPA-3000 i5+ is a high productivity mix-and-match Stepper. Global Capital Equipment Market Equipment for Semiconductor Manufacturing +1-856-401-8900; [email protected] Aperture . Field Size 22x22 17x26. Related Equipment For Sale. This Canon i5++ Stepper is being offered fully refurbished with installation and 3 months parts and labor warranty worldwide. quote. Recently Sold Equipment. 1994年のFPA-3000i4発売から長期間にわたり数多くのお客さまにご愛用頂いているFPA-3000. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. 装置名：FPA-5550iZ2. Alternate Part# BH8-0662 Laser Interferometer PCB. Achieves 0. fpa 3000 series. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5+. The i-Line Filter (Universal) is a narrow bandpass filter for the main exposure light used on the Canon FPA-3000 series steppers. 新型レチクルステージおよびウエハーステージを採用し、露光処理を高速化することで露光処理時間を大幅に向上、また、アライメントシーケンスの改良やウエハー搬送時間の短縮化などによって、1時間あたりのウエハー露光枚数を300枚. Free standard shipping and handling offer is a $5. 1 2. Released in 1994, the first FPA-3000 series supported the golden age of semiconductors in Japan. CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. FPA 3000 IW, MR Brand new Y60-0863-000 1st Condenser Lens (2) ASS’Y. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. 63 Field Size: 22x22 (or 17x26) Standard Illumination: Light Source: 2. CANON FPA 3000 i5+ is a high-precision, automated production-level wafer stepper designed for advanced semiconductor fabrication applications, featuring an imaging unit for 0. amcoss parts for Canon FPA 3000 i4/i5 AA/FRA optics. The Canon FPA-3030i5+ delivers long-term solutions for device manufacturers. Quantity: 0. Explore!TOKYO, October 31, 2023—Canon Inc. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperCANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. FPA-5550iZ2 steppers optimize alignment, exposure & wafer transfer sequences, shorten wafer lot exchange times. $650. 実績のあるi線ステッパー「FPA-3030i5+」と共通のウエハー搬送システムを搭載し、IoT関連デバイスやパワーデバイスの製造に用いられるさまざまな材質、径、厚さの基板の搬送に対応します。 CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. 200mm以下の小型基板向けi線ステッパー“FPA-3030i5a”. Last Verified: Over 60 days ago. 35um -. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. 多様な半導体デバイス製造とCoO（Cost of Ownership）の低減を実現したi線ステッパー. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. Alternate Part No : BG4-6703-R00. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5 Stepper ; CANON FPA-3000 i5+ Stepper; CANON FPA. CDSEM & SEM (4) KLA-Tencor 8100 CD-SEM. 3. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperCANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5 Stepper ; CANON FPA-3000 i5+ Stepper; CANON FPA. CANON 機台零件服務. Selling "as is, where is. Item id:108968, model FPA3000 EX3/ i5 (Spares) manufactured by Canon. Recently Sold Equipment. Please click on the "Get Quote" button at the end of the BH8-2017-01 description, if you'd like to get a quotation, photos and specifications of this IL3-CD-PCB for Canon FPA. CANON BG4-7267-000 For Sale. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5 Stepper ; CANON FPA-3000 i5+ Stepper; CANON FPA-3000. 00. Light Source: 2. Recently Sold Equipment. 06. Quantity: 1. Related Equipment For Sale. Suitable for: FPA-3000 EX3 DUV Stepper, FPA-3000 EX4 DUV Stepper, FPA-3000 EX6 DUV Stepper, FPA-3000 i4 Stepper, FPA-3000 i5 Stepper, FPA-3000 i5 Stepper, FPA-3000 i5+ Stepper, FPA-3000 i5++ Stepper, FPA-3000 iW Stepper, FPA-3000 MR Stepper. Black and White Monitor For Canon FPA-3000 steppers. This service offering includes: Scheduled PM service; Emergency tool down service; Stepper relocation;CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Comments. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. ・広画角の露光が可能でありながら1. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. 99 Canon online store value. Suitable for: FPA-3000 EX3 DUV Stepper, FPA-3000 i4 Stepper, FPA-3000 i5 Stepper, FPA-3000 i5 Stepper, FPA-3000 iW Stepper, FPA-3000 MR Stepper. Integrates other FPA-3000 tools for optimum mix and match. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5 Stepper ; CANON FPA-3000 i5+ Stepper; CANON FPA-3000. ・50mm（2inch）～ 200mm（8inch）の幅広いウエハーサイズ対応. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold EquipmentCANON FPA 3000 i5 Wafer Stepper is an advanced lithographic equipment with a powerful variable NA projection lens and HDR imaging, offering high-precision masks with up to 125nm resolution, multi-directional alignment, focus controller and automation capabilities for complex circuit layouts. This cutting-edge machine uses a unique, innovative technology called Improved Resolution Image Metrology (IRIM) that provides a 25% improvement in optical performance compared to other wafer steppers. The FPA-5550iZ2 offers a balance between productivity and alignment. Material Quartz. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5 Stepper ; CANON FPA-3000 i5+ Stepper; CANON FPA. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; This product is located at our USA - East Coast HQ facility. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. 99 to $15. CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON FPA 3000 i5 is a high-performance, optical processor used to produce large-scale integrated circuits. Recently Sold Equipment. 3. Related Equipment For Sale. Canon FPA-6000 ES6a Details. ASE Semiconductor Status. Related Equipment For Sale. 95. Temple, TX, USA. 60 nm Field Size: 22X22mm. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. 0KW Super High Pressure Hg Lamp. Reticle: 1. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Trusted Seller. Comments. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. com; Equipment; Parts. In Stock, Ready to Ship. Recently Sold Equipment. Specialist on following equipment, (Disassembly, Assembly & Process Qualification and Training)Canon Stepper FPA 3000 Series i4, iW, MR, i5,i5+, i5++ ( 365nm i-line)Canon Stepper FPA 3000 Series EX3,EX3L, EX4,EX5,EX6 ( 248nm DUV)Canon Scanner FPA 4000 Series ES1 ( 248nm DUV)Canon Scanner FPA 5000 Series ES2,. TSA (Through Silicon Alignment) is. Comments. Comments. CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Comments. Size 6" square t=0. Related Equipment For Sale. Comments. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperCANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-5500 IZ Details. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold EquipmentCanon FPA-3000i5+ Stepper. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperConfiguration: Canon Part# Y60-1095-R00 XY wafer stage, Fully refurbished. amcoss parts in Nikon Body i8 – i12 optics. CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5 Stepper ; CANON FPA-3000 i5+ Stepper; CANON FPA-3000 i5++ Stepper; CANON. 1/1. 8µm resolution and 4-shot exposure with minimal distortion to make possible a wide 100×100mm exposure field. Canon Fujitsu Denso 4250-E921 Hi-Voltage power supply for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 Canon Fujitsu Denso 4250-E921 . CANON BG4-7267-000 For Sale. Canon Stepper FPA 3000 Series i4, iW, MR, i5,i5+, i5++ ( 365nm i-line) Canon Stepper FPA 3000 Series EX3,EX3L, EX4,EX5,EX6 ( 248nm DUV) Canon Scanner FPA 4000 Series ES1 ( 248nm DUV) Canon Scanner FPA 5000 Series ES2, ES2+,ES3,ES4,ES5, ( 248nm DUV) Canon Scanner FPA 5000 Series AS1,AS2,AS3 ( 193nm DUV) Canon. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. Turn-key Stepper/Track package can. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5 Stepper ; CANON FPA-3000 i5++ Stepper; CANON FPA. 1μm (mean + 3 sigma) Throughput: > 68 wafers / hour (6”, 32 shots) > 44 wafers / hour (8”, 60 shot) Wafer Leveling: Die-by-die tilt, Global tilt. Description: BACK PLANE PCB (VME) Quantity: 0. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper;. Wide range With extensive domestic and international experience, SERVTECH is a world leader in sales, service, training and support for pre-owned or used Canon Steppers, including the Canon FPA-3000 i4, iW, i5, i5+, i5++ and FPA 3000 EX3, EX4, EX5, EX6 series Steppers. The long-selling popular FPA-3000 series — equipped with i-line lens for 0. Resolution : 0. Comments. 2. Description: HRD PROCESSING PCB ASS'Y. Integrates other FPA-3000 tools for optimum mix and match lithography. Material Quartz 3. 2004: Quantity: 1: Sales Condition:. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper;. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA 3000 i5 Wafer Stepper is a precision alignment equipment designed to increase throughput and accuracy in lithography processes, featuring an array of optical and mechanical features, and advanced. 63. FPA-5550iZ2. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. キヤノンは、環境負荷を低減する電子部品であるグリーンデバイスや、MEMS（微小電気機機械システム）デバイス向けの半導体露光装置"FPA-3030i5+"を6月26日より発売します。. Field size is 22mm x 22mm. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. ・50mm（2inch）～ 200mm（8inch）の幅広いウエハーサイズ対応. Canon FPA-3000 i5/ i5+ stepper. However, with the introduction of the BiHEMT process, involving the fabrication of both BipolarCANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. 64: Quantity: View Specs Print Specs . CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Find many great new & used options and get the best deals for Unix workstation controller Canon Stepper FPA-3000 i4 i5 i5+ EX3 EX4 EX5 EX6 iW at the best online prices at eBay! Free shipping for many products!CANON FPA 3000 i5+ is a state-of-the-art lithography system designed to meet the needs of the most demanding semiconductor manufacturers with its high-NA lens for maximum resolution and throughput while offering a 5. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperCanon Fujitsu Denso 4250-E921 Hi-Voltage power supply for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 Canon Fujitsu Denso 4250-E921 . CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON Spare Parts for Sale. FPA-3000 I5++ (for CANON) and others 2700W MERCURY SHORT ARC DOUBLE FPA3000 DC. Canon FPA-2500 i2 Details. 5BL (SG 24786) Console: HP 715 X-terminal Aut. 15 micron feature resolution, 6-layer film processing, high throughput, and built-in control and automation capabilities for reduced production time and improved accuracy. Canon Fujitsu Denso 4250-E921 Hi-Voltage power supply for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 Canon Fujitsu Denso 4250-E921 . Description: HeNe Laser Unit. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperCANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-2000 i1 STEPPER BH8-1238-02 / BG4-3345 / B21L-CD / BG8-2360, BG4-2101. 1993: Quantity: 1: Sales Condition:. 1/1. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Canon FPA 3000 I5 + i-line Stepper available for Sale by SDI Group. FPA-3030iWa FPA 3000 i5. Related Equipment For Sale. 59 Length: 13. FPA-3030i5a. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. FPA-3030i5a. We are also offering TEL ACT 8, Single Block, DUV, Coater/Developer from our stock. Comments Related Equipment For Sale. This in turn enables mass production of large and dense packaging with fine circuit patterns that integrate 2. Projection Optics: Projection Magnification: 1/5 X Exposure Light: 248nm DUV Numerical Aperture: 0. Reticle: 1. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Size 4” thru 8” SEMI Standard, JEIDA, Notch / Flat : Projection Optics:CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Related Equipment For Sale. bg4-9250-000 . Wafer Size : 8" SEMI (OF) -. Find many great new & used options and get the best deals for Unix workstation controller Canon Stepper FPA-3000 i4 i5 i5+ EX3 EX4 EX5 EX6 iW at the best online prices at eBay! Free shipping for many products! CANON FPA 3000 i5+ is a state-of-the-art lithography system designed to meet the needs of the most demanding semiconductor manufacturers with its high-NA lens for maximum resolution and throughput while offering a 5. ・広画角52mmx52mm画面サイズ一括露光可能. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. 05. BG4-2035 IPIF-III . With an 800mm x 800mm field size, CANON FPA 3000I5 is an advanced optical imaging. 06. SDI ID: 38362; Manufacturer: Canon: Model: FPA-2500 i2: Description: I-line Stepper: Version: 200mm: Vintage: 01. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. ・広画角52x68mmまたは55x55mm画面サイズ一括露光可能. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper;. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperCanon Fujitsu Denso 4250-E921 Hi-Voltage power supply for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 Canon Fujitsu Denso 4250-E921 . Comments Related Equipment For Sale. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; This product is located at our USA - East Coast HQ facility. *FPA-3030 platform that has already demonstrated high reliability among customers in the market since release. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. LD/PD board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 LD/PD board suitable for Canon FPA3000 series (P/N BH8-1818-01, BG4-6789) 53056 BG9-4757, BH8--1069-01 AF DRV board for Canon FPA 1550 series AF driver board from Canon 1550 MarkIV series 53057 BG9-4760, BG83111, BH8-1071-02CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; This product is located at our USA - East Coast HQ facility. CANON FPA 3000 i5 is a world leading wafer stepper and a state-of-the-art lithography system, specifically designed for DNA nanotechnology. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5 Stepper ; CANON FPA-3000 i5+ Stepper; CANON FPA-3000. And by enabling alignment measurement with Dark-Field can enhance process robustness. Canon FPA-6000ES6a Wafer Imaging ScannerCANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. With extensive domestic and international experience, SERVTECH is a world leader in sales, service, training and support for pre-owned or used Canon Steppers, including the Canon FPA-3000 i4, iW, i5, i5+, i5++. NVIDIA GeForce RTX 3000 Series (1) Intel Iris (27) Intel HD/UHD Graphics (13) Other (32) Memory/RAM 4-6GB (7) 8-12GB (41) 16-32GB (27). CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. " We do not have the ability to test all equipment. Related Equipment For Sale. Canon FPA-6000 ES5 Details. 7" Mask Aligner, designed for die-bonding and wire-bonding applications with features to increase accuracy and throughput including high-speed scanning and integrated resist track machine. Intensity 6500 W/m2. Location. 9~52. CANON FPA 3000 i5 Wafer Stepper is a precision alignment equipment designed to increase throughput and meet the exacting requirements of next-generation device manufacturing and wafer production. PDI CONTROLLER for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6: spares: 30. Discover Canon's advanced wafer steppers, like the FPA 3000 i4 and FPA 3000 iW, renowned for their precision and productivity. CANON FPA. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Canon Stepper FPA-2500i3. Canon Stepper FPA-3000 i5. 22mm×22mmの画角において、NA0. Masking Blade . 25". 【プレスリリース】発表日:2020年10月27日小型基板向け半導体露光装置"FPA-3030i5a"を発売多様な半導体デバイス製造とCoO（Cost of Ownership）の低減を. This page provides information on i-line Stepper. Item id:53074, model FPA 3000 series extended reticle library manufactured by Canon. The FPA-3030iWa supports smaller substrates which are 200 mm or less in diameter. Comments Related Equipment For Sale. Same as alternate Part#s BG8-2252 BH8-0670-04 . 実績のあるi線ステッパー「FPA-3030i5+」と共通のウエハー搬送システムを搭載し、IoT関連デバイスやパワーデバイスの製造に用いられるさまざまな材質. 2. Canon; KLA Tencor; Credence; All Parts; Request a Price Quote: Subject* First Name* Last Name* Company* Title; Phone* Email* Country* * [We do this to ensure a human being is submitting this request not an automated program. 0KW Super High Pressure Hg Lamp. 5GHz RF Converter. Save time and resources across your business processes with management, automation and information capture software. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5 Stepper ; CANON FPA-3000 i5+ Stepper; CANON FPA. 200mm以下の小型基板向けi線ステッパー“FPA-3030iWa”. Achieve superior chip quality and high resolution with Canon's innovative technology. CANON BG4-7266-000 For Sale. 07 Inches ---- 332. FPA 3000 i5. 4” SEMI Detector Unit (R) Related Equipment For Sale. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperHe-Ne Laser (633 nm) Broad Band (Halogen lamp) Alignment Accuracy: < 0. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5 Stepper ; CANON FPA-3000 i5+ Stepper; CANON FPA-3000. Alternate Part# BH8-0800. The FPA-3000iW has a small footprint, is easy to operate, and is compatible with Canon’s family of FPA-3000 steppers. Projection Optics: 1. CANON FPA-3000 EX5 DUV Stepper. The FPA-5550iZ2 offers a balance between productivity and alignment. CANON FPA-5000ES4 Details. QuoteCANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. By combining with other FPA-3000 tools such as the FPA-3000EX6 KrF stepper the i5+ delivers optimized mix and match lithography. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. 25GHz-29. Quantity: 0. Parts Equipment Specifications EQUIPMENT SPECIFICATIONS Canon Stepper FPA-3000 iW Stepper Canon FPA-3000 iW canon stepper parts photolithography equipment. FPA 3000 I4, I5 Brand new BG4-6692-000 2ND ZOOM Lens ASS’Y. 0% Parts Equipment Specifications EQUIPMENT SPECIFICATIONS Canon Stepper FPA-3000 iW Stepper Canon FPA-3000 iW canon stepper parts photolithography equipment specifications available at Servtech Inc. Suitable for: FPA-3000 EX3 DUV Stepper, FPA-3000 EX4 DUV Stepper, FPA-3000 EX6 DUV Stepper, FPA-3000 i4 Stepper, FPA-3000 i5 Stepper, FPA-3000 i5 Stepper, FPA-3000 i5+ Stepper, FPA-3000 i5++ Stepper, FPA-3000 iW Stepper, FPA-3000 MR Stepper. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperFurthermore, Canon's lithography equipment incorporates a high-precision lens driving mechanism to correct for aberration caused by minor environmental changes during exposure, including atmospheric pressure and temperature changes, thereby producing a high level of resolution. Comments. キヤノンは、半導体露光装置の新製品として、化合物半導体などのデバイス製造に対応し、半導体製造に必要な総コストの指標であるCoOを低減したi線 ※1 ステッパー“FPA-3030i5a”を2021年3月上旬に発売します。. Pattern Material 2 layer Cr, 3 layer Cr 4. Related Equipment For Sale. 基本情報. Canon item numbers Nikon item numbers ASML item numbers Ultratech item numbers. Includes: (1) CANON FPA-3000 iW Fine Pattern Aligner. Exposure Light Kr F (365nm) Illumination: 1. Click on the desired Canon Photolithography equipment from the list below and you will be directed to its specification sheet: Canon Stepper MPA-600FA. Comments. CANON FPA-3000 I5+ STEPPER - I-LINE available for Sale by SDI Group. FPA-6300ES6a、FPA-5550iZ2 (as of Sept. quote. Comments. Wafer Loader :. Related Equipment For Sale. 310-0 i5 Standard Test Reticle: BG3-3368-000:. Comments. ASE Semiconductor. Quantity: 0. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. 5mm field size, advanced dose control and measurements, and closed-loop positioning accuracy. CANON FPA-3000 EX5 DUV Stepper For Sale Configuration: Wafer size: 4" / 6" / 8" (customer may specify per their requirement) Reticle size: 6" Square Field Size: 22 X 22. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Parts Available For CANON FPA-3000 iW Stepper. IV. CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. 24 Field Size: 50X50mm ~ 47. FPA-3030i5+. 35um, Align: 60nm, Field: 22mm, i-Line: 1 FPA-5550iZ2 i-line Steppers offer a low cost Mix-&-Match lithography solution for advanced Logic, Memory and CMOS Image Sensor (CIS) fabrication. Standard Illumination: Exposure Light: DUV (Deep Ultra Violet CANON FPA 3000 i5 is a state-of-the-art lithography system that is capable of imaging patterns at resolutions below 100nm and with ultra-high accuracy. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. Related Equipment For Sale. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold EquipmentCANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. 610-04 i5 Standard Test Reticle: BG3-4062-000: Laser Head Unit: BG4-3329-000: Ring Chuck:. Also known by alternate Part#(s): BG4-6603 . CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. 66. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold EquipmentCanon Stepper FPA-3000 EX5 . 40 – 0. CANON FPA-5000ES4 Details. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Recently Sold Equipment. i線ステッパー 前工程向け 広画角・高解像力 i線ステッパー. 15 micron feature resolution, 6-layer film processing, high throughput, and built-in control and automation capabilities for reduced production time and improved accuracy. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperCANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Trust Canon's commitment to delivering. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Comments. PS0177 Shutter Mirror for Canon FPA 3000 Shutter FPA 3000 PS0178 Main Exposure I Line Filter iZ BW 4nm FPA5000 iZ Y60-1506, 1508, 1509,. Comments:Experience in Canon Stepper FPA-3000, i4, i5 and i5+, Canon FPA 1550 M. 1999: 1: as is where is: immediately: 53050: Canon: BH8-1818-01: LD/PD board for Canon FPA 3000 series iw. Size 6" square t=0. Material Quartz 3. General Specification and Information: Model: FPA 3000 i5++ First year available: 1999 Lens Type: UL34II Stage Type: FLAT Chamber Type: CD 83 Projection Optics:. Canon Steppers; KLA CDSEM; Credence Kalos; Equipment wanted for purchase; Request a Price Quote: Subject * First Name * Last Name * Company * Title; Phone * Email * Country * [Please answer this simple math question. CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. 2005: Quantity: 1: Sales Condition:. 4. Canon FPA-2500i3 photolithography equipment stepper specifications available at Servtech Inc. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold EquipmentCANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Suitable for: FPA-3000 EX3 DUV Stepper, FPA-3000 EX4 DUV Stepper, FPA-3000 EX6 DUV Stepper, FPA-3000 i4 Stepper, FPA-3000 i5 Stepper, FPA-3000 i5 Stepper, FPA-3000 i5+ Stepper, FPA-3000 i5++ Stepper, FPA-3000 iW Stepper, FPA-3000 MR Stepper. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperCANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Low NA i-line stepper for power devices, IoT related devices, and smaller substrates of 200mm or less FPA-3030i5a i-line Steppers provide low Cost-of-Ownership manufacturing for small substrates and are capable of imaging resolution below 0. Wafer: 1. Reliable Company! We give trust from the beginning to the end of the business. Size 4” thru 8” SEMI Standard, JEIDA, Notch / Flat. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperCANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. SDI ID: 70287; Manufacturer: CANON: Model: FPA-5000ES4: Description: 248 nm lithographic exposure tool: Version: 200 mm: Vintage: 01. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. Canon Stepper MPA-600 Super. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. It is capable of imaging patterns. 6" No. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. This Canon EX6 stepper is being offered fully refurbished with installation and 3 months parts and labor warranty worldwide. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5 Stepper ; CANON FPA-3000 i5+ Stepper; CANON FPA. Comments. pcb boards; lens; machines list; wafer chucks; cables & tools; wafer alignment kit; project & news. Projection Optics: Projection Magnification: 1/5 X Exposure Light: 248nm DUV Numerical Aperture: 0. 13 Years. CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Reticle: 1. MOCVD (1) AIXTRON G5 WW C Planetary Reactor. CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. 1/3. Comments Related Equipment For Sale. CANON FPA-3000 EX5 DUV Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; This product is located at our USA - East Coast HQ facility. Intel i3, Intel i5, Intel i7, Intel i9. 特長 1．高い生産性の実現. Related Equipment For Sale. Model: FPA 3000 i5 First year available: 1996 Lens Type: UL34-II Stage Type: FLAT Chamber Type: CD83 Projection Optics: Projection Magnification: 1/5 X Exposure Light: 365nm Numerical Aperture: . 2. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. SDI ID: 70287; Manufacturer: CANON: Model: FPA-5000ES4: Description: 248 nm lithographic exposure tool: Version: 200 mm: Vintage: 01. 装置名：FPA-3030EX6. CAP3 PCB . CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. Comments. FPA 3000 I4, I5 Brand new Y60-1010-000 PLANE PARALLEL PLATE UNIT.